In semiconductor fab CMP (Chemical Mechanical Planarization) slurry transfer and precision dispensing systems, fluidic tubing encounters severe high-frequency cyclic squeezing and negative pressure pulses. Under continuous dynamic shear and tight bend installations: Conventional Tubing: Suffers from shear strain fatigue, leading to lumen Buckling Failure (flattening). Volumetric Decay: Causes severe volumetric flow rate drift, degrading CMP […]
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